METHOD FOR EVALUATING OPTICAL SYSTEM

摘要

PURPOSE: A method of evaluating an optical system is provided to enable the profile, distortion and illuminance of a spot to be simultaneously measured since the position of the spot can be estimated using a wave function. CONSTITUTION: A method of evaluating an optical system is as follows. A spot, which passes through a lens unit, is formed using a lighting unit(S410). The spot is defocused. The intensities of defocused lights on at least two positions are measured using a sensor unit(S420). The information of the spot is obtained using the measured intensities of the lights. The information of the spot is obtained by the calculating of a phase from the intensity change of the lights on a first position and a second position(S440). The information of the spot comprises a profile, distortion and illuminance.