| 摘要 |
PURPOSE: A grinding unit, a substrate process apparatus including the same, and a method thereof are provided to improve the productivity by reducing the required time by grinding the substrate simultaneously using a plurality of grinding pads. CONSTITUTION: A substrate support unit(100) supports a substrate. A container unit(200) retrieves the fluid distributed from the rotating substrate. A grinding unit(300) grinds the substrate supported by the substrate support unit. A processing liquid supplying unit(500) supplies the processing liquid which is offered for cleaning and grinding.
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