| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrator for a piezoelectric vibration gyro, having one arm having fewer electrodes, i.e., two electrodes, reduced in a size of a driving detection circuit, and in an occupation area of a portion in the vicinity of a connection section, and also having a detection sensitivity higher than heretofore, and also to provide an angular velocity detection system. <P>SOLUTION: This vibrator for the piezoelectric vibration gyro is equipped with: a substrate having the arm 5 bending and vibrating; and a base section 7 for supporting and fixing the arm 5, a lower electrode 4, a piezoelectric film 3 and upper electrodes 2a, 2b. The vibrator drives and detects a vibration in an X axis direction parallel to a film forming face of the piezoelectric film 3 and in a Z axis direction perpendicular to the film forming face thereof. The upper electrodes 2a, 2b are formed at a flexure of the arm 5, the upper electrode 2a is used for driving or detecting the vibration in the X axis direction, and the upper electrode 2b is used for driving or detecting the vibration in the Z axis direction. Here, when widths of the upper electrodes 2a, 2b in the X axis direction are respectively represented by "A" and "B", the values A, B are set so as to satisfy a formula: 0.3≤A/B≤0.7. <P>COPYRIGHT: (C)2011,JPO&INPIT |
