发明名称 |
OPTICAL ETCHING DEVICE FOR LASER MACHINING |
摘要 |
An optical etching device for laser machining is provided and includes a laser light source and an optical head. The laser light source emits an incident beam. The optical head includes a transparent substrate, an opaque film and a sub-wavelength annular channel. The laser energy tolerance of the transparent substrate ranges from 8 J/cm2 to 12 J/cm2. The opaque film has a first surface and a second surface opposite to the first surface. The transparent substrate is adhered to the first surface. The sub-wavelength annular channel is formed in the opaque film and extends from the first surface to the second surface so that the incident beam from the transparent substrate generates a surface plasma wave on the opaque film.
|
申请公布号 |
US2011036818(A1) |
申请公布日期 |
2011.02.17 |
申请号 |
US20100774642 |
申请日期 |
2010.05.05 |
申请人 |
NATIONAL TAIWAN UNIVERSITY |
发明人 |
LEE CHIH-KUNG;YEH JYI-TYAN;LIN DING-ZHENG;CHENG TSUNG-DAR;CHANG CHIN-KAI |
分类号 |
B23K26/00 |
主分类号 |
B23K26/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|