| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a vacuum package to achieve high vacuum without generating poor sealing nor malfunction. <P>SOLUTION: The method of manufacturing the vacuum package includes a step of setting a package with a through-hole formed thereon in a vacuum chamber with a transmitting window, a step of decompressing inside the vacuum chamber, a step of placing sealing material in the through-hole, and a step of sealing the through-hole by irradiation of a laser onto the sealing material through the transmittance window from outside the vacuum chamber. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
