| 摘要 |
PROBLEM TO BE SOLVED: To prevent variation of length measurement values by SEMs between devices. SOLUTION: The SEM control device comprises: an image acquisition unit that acquires images of a prescribed object, each of which is formed of a plurality of pixels lined up in a first direction, at a plurality of positions in a second direction perpendicular to the first direction by the SEM; a variation range calculation unit that obtains maximum values and minimum values of gray scale values among the plurality of images at respective locations of the plurality of pixels, and calculates a variation range of the maximum values and a variation range of the minimum values for the plurality of pixels; and a brightness/contrast adjustment unit that adjusts brightness and contrast of the SEM to minimize a difference between the variation range of the maximum values and the variation range of the minimum values. COPYRIGHT: (C)2011,JPO&INPIT
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