发明名称 SYSTEM AND METHOD FOR PICKING AND PLACEMENT OF CHIP DIES
摘要 <p>According to an aspect of the invention, there is provided a chip die manipulator apparatus arranged for pick and placing of a chip die (30) in a chip manufacturing process, comprising: a pickup head arranged to pick up the chip die with an active side facing the first pickup head (11); a second pickup head (21) arranged to perform a flip chip movement of the chip die (30), to have the active side facing away from the second pickup head (21), wherein the first pickup head (11) comprises a test card (12) comprising contact pads arranged to contact the active side of the chip die (30); and a clamp for clamping the chip die against the contact pads. Advantages may include reduction of the number of process steps and providing less breakdown risk in the manufacturing process due to in-place testing of chip dies.</p>
申请公布号 WO2011019275(A1) 申请公布日期 2011.02.17
申请号 WO2010NL50502 申请日期 2010.08.10
申请人 NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO;VAN DER ZON, CLEMENS MARIA BERNARDUS 发明人 VAN DER ZON, CLEMENS MARIA BERNARDUS
分类号 H01L21/00;H05K13/04 主分类号 H01L21/00
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