| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a rotary application device capable of improving selectivity of an application liquid, and performing a high-accuracy application process even when application liquids having various kinds of property values are used. <P>SOLUTION: This rotary application device 1 for applying an application liquid to an application object 2 having a circular or polygonal plane as an application object surface, and diffusing the application liquid by rapidly rotating the application object 2 to form an application film includes: a flat disc-like support base 3 for supporting the application object 2 in parallel thereto; and a flat disc-like parallel flat plate 4 arranged in parallel and oppositely to the support base 3 to have a clearance, and forming an open space S in the clearance to the support base 3; wherein the support base 3 and the parallel flat plate 4 are rotationally driven independently of each other around a rotary shaft 60 and a rotary shaft 70, respectively. <P>COPYRIGHT: (C)2011,JPO&INPIT |
