| 摘要 |
PROBLEM TO BE SOLVED: To determine by simulation whether a material can be decomposed by a pulse laser, at a high speed. SOLUTION: A simulation apparatus includes an aggregation energy calculating section for calculating aggregation energy of the material, an internal energy difference calculating section for calculating the difference in internal energy of the material before and after the material is irradiated with the pulse laser having a predetermined waveform and an intensity, and a determination section for determining whether the material can be decomposed by irradiation with the pulse laser, based on the difference in the internal energy and the aggregation energy. COPYRIGHT: (C)2011,JPO&INPIT
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