| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater unit having a safe configuration preventing a volatile component of an organic solvent, etc. from reaching inside of the heater unit and suppressing thermal propagation to the periphery of the heat unit. SOLUTION: The heater unit 12 includes: an air heater 1 in which a jetting port for ejecting heating air for heating a treated object is located at a tip; and a casing for storing the air heater 1. A projecting port 5a from which the air heater 1 can be protruded is provided in the casing, and a shutter 5 for changing the opening/closing state of the projecting port 5a is provided in the projecting port 5a. A movement mechanism 2 for changing a relative distance between the projecting port 5a and the air heater 1 by moving the air heater 1 is arranged within the casing. An upper gas introduction port 8 and lower gas introduction port 9 for introducing cooling gas suppressing temperature rise within the casing to inside of the casing and a gas discharge port 10 for discharging the cooling gas to outside of the casing are formed in the casing. COPYRIGHT: (C)2011,JPO&INPIT
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