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发明名称
Spannungs-Stromsonde mit hoher Anpassungs-Richtcharakteristik
摘要
申请公布号
DE69943101(D1)
申请公布日期
2011.02.17
申请号
DE19996043101
申请日期
1999.02.17
申请人
MKS INSTRUMENTS INC.
发明人
GERRISH, KEVIN SEAN
分类号
H01J37/32;H05H1/00
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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