POSITIONING SYSTEM, AND LITHOGRAPHIC APPARATUS AND METHOD

摘要

PROBLEM TO BE SOLVED: To reduce flexibility and internal deformation by increasing rigidity of an object body and/or dampening vibration.

SOLUTION: A positioning system is provided for positioning a movable object having a body. The positioning system includes: an object position measurement system for measuring a position of the object; an object actuator; an object controller; and a stiffener which increases rigidity and/or dampens relative movement inside the object body. The stiffener includes: a plurality of sensors each of which is arranged to determine a measured signal representing internal deformation or relative displacement of the body; one or more actuators each of which is arranged to apply actuating force to a part of the body; and at least one of controller which is configured to deliver an actuation signal to at least one of the actuators based on the measured signal determined by at least one of the sensors so as to increase rigidity and/or dampen movement inside the body.

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