Bearing device for use in measuring device utilized for measuring dimension and/or contour and/or roughness of test specimen, has axial-air bearing axially mounting rotor at stator, and radial air bearing over which rotor is mounted

摘要

The device (2) has a stator (4) and a rotor (6) that is mounted over a radial air bearing (8) at the stator. The radial air bearing is provided with toroidal bearing surfaces (10, 12) at the stator and/or the rotor. An axial-air bearing (26) axially mounts the rotor at the stator. The radial and axial-air bearings are designed as static air bearing. The axial-air bearing is provided with flat surfaces (28, 30) at the rotor. The stator has an upper part (16) that is detachably connected with a lower part (14), where the rotor is held between the lower part and the upper part. An independent claim is also included for a measuring device comprising a pressure foot.