A VACUUM CHUCK USED IN SEMICONDUCTOR MANUFACTURING FACILITIES WITH OUTSIDE WALL WHICH HAS GAPS

摘要

PURPOSE: A vacuum chuck with external wall gaps is provided to fix a wafer in a planar state by forming a plurality of gaps in a constant interval on the external wall of the vacuum chuck. CONSTITUTION: A chuck body(110) is formed into the same shape as a wafer. An internal tip for fixing the wafer(120) is formed on the upper side of the chuck body in a pre-set interval in order to support the rear side of the wafer. An external wall(130) surrounds a vacuum region which is formed by the internal tip for fixing the wafer. A plurality of gaps(135) is formed on the external wall. An ejection pin moving hole(140) passes through the chuck body. A vacuum hole(150) passes through the chuck body.