METHOD OF MANUFACTURING CERAMIC SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic substrate. SOLUTION: The method of manufacturing the ceramic substrate includes: a step of providing a first ceramic laminate which includes a plurality of first ceramic green sheets; a step of forming at least one separation induction layer on the first ceramic laminate; a step of laminating a second ceramic laminate which includes a plurality of second ceramic green sheets on the first ceramic laminate to form a ceramic laminate for a substrate; a step of partly cutting the laminated second ceramic laminate; a step of baking the ceramic laminate for a substrate; and a step of removing the partly cut regions in the baked ceramic laminate for a substrate to form a cavities. Thereby, a method of manufacturing the ceramic substrate capable of preventing deformation around the cavities by applying a non-shrinkage firing method can be provided. COPYRIGHT: (C)2011,JPO&INPIT