| 摘要 |
PROBLEM TO BE SOLVED: To provide a super-precision shape measuring method for rotation symmetrical shape, capable of measuring a rotation symmetrical shape and particularly, a shape of a surface of an object to be measured having a spherical surface or an aspherical surface approximate to the spherical surface and having a small curvature radius, with a shape precision of approximately 1 nm in a short time and capable of attaining cost reduction. SOLUTION: The normal vector tracking type super-precision shape measuring method determines a shape by reflecting measurement beam on a surface of an object to be measured, detecting the reflected beam with an optical detector and measuring a normal vector at a given measurement point of the surface. The optional detector 5 measures a displacement of reflection beam in a receiving surface. After an optical axis of an optical system 2 is made to meet a center line of the object to be measured and initial setting is made to overlap the measurement beam with the reflected beam, only one of a sample system 3 or an optical system 2 is driven with a set of two axes of goniometers 6, 7, a measurement range of the surface of the object to be measured is scanned with the measurement beam, and a normal vector at that point is calculated from an angular change in the reflected beam. COPYRIGHT: (C)2011,JPO&INPIT |
