发明名称 SELEKTIV DIFFUSION AV ALUMINIUM
摘要 A silicon substrate is coated with a mask comprised of the combination of a silicon dioxide layer and a layer of undoped polycrystalline silicon. Aluminum is then diffused through windows formed in the mask. The mask has proven effective for relatively deep aluminum diffusion.
申请公布号 SE7713183(A) 申请公布日期 1978.06.10
申请号 SE19770013183 申请日期 1977.11.22
申请人 * RCA CORPORATION 发明人 W * ROSNOWSKI;S * PONCZAK
分类号 H01L21/22;H01L21/033;H01L21/223;(IPC1-7):H01L21/22 主分类号 H01L21/22
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