发明名称 |
VACUUM PUMPING SYSTEMS |
摘要 |
The present invention relates to a vacuum pumping system (10) which comprises: a vacuum pumping mechanism (12) and a motor (14) for driving the vacuum pumping mechanism. Means (16) are provided for determining a cumulative load on the vacuum pumping system over time by monitoring a characteristic of the motor over that time. Means (18) are also provided for activating a maintenance activity on the system when the cumulative load exceeds a predetermined amount. |
申请公布号 |
KR20110016464(A) |
申请公布日期 |
2011.02.17 |
申请号 |
KR20107029797 |
申请日期 |
2009.06.02 |
申请人 |
EDWARDS LIMITED |
发明人 |
PHILIPPE LAURENT MARC;GIBBINS NIGEL JAMES;CZERNIAK MICHAEL ROGER;MOONEY MICHAEL |
分类号 |
F04D27/00;F04B51/00;F04C28/28;F04D19/04 |
主分类号 |
F04D27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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