IN SITU OFFSET COMPENSATION FOR PRESSURE SENSORS

摘要

A pressure sensor having a substrate and a first, deformable membrane, partially supported by the substrate, which generates a first sensor reading when deformed by pressure. A second membrane is contiguous to the first membrane. When the second membrane is energized, it deforms the first membrane to alter the first sensor reading. The objective of the invention is to enable automatic correction of sensor readings without input from a user.