| 摘要 |
PROBLEM TO BE SOLVED: To provide an evacuation device and a method for using the evacuation device improving exhaust performance, shortening regeneration time and arranging a simple driving system of a valve. SOLUTION: The evacuation device 102 includes a main pump 11 capable of evacuating inside of a vacuum tank 10 and the valve 20, used for opening and closing an evacuation port 11A of the main pump 11, having a valve element 22 and a valve seat 23 arranged to face each other. When the evacuation port 11A is closed by the valve 20, an auxiliary pump isolation chamber 27 in which an auxiliary pump 25 isolated from the evacuation port 11A is arranged is formed by the valve element 22 and the valve seat 23. COPYRIGHT: (C)2011,JPO&INPIT |
