| 摘要 |
PROBLEM TO BE SOLVED: To provide a microvalve applicable to an extra-minute micropump and having a simple structure, and to provide a method of manufacturing the same. SOLUTION: The microvalve is constituted to have a flow passage formed by sticking a cover substrate 13 to a main substrate 1 having a groove 3. The main substrate 1 has a laminated structure constituted by laminating a first main substrate layer 1a, a second main substrate layer 1b, and a third main substrate layer 1c. A valve element 5 formed in the groove 3 is formed of the same material as that of the first main substrate layer 1a, protrudes from a first side wall 3a of the groove 3, is formed at a fixed interval from a second side wall 3b opposing the first side wall 3a, and has a film thickness deformable by the pressure of fluid flowing in the flow passage when seen from above. A void 7 formed after removing the second main substrate layer 1b is formed between a bottom face 3c of the groove 3 and the valve element 5. When fluid pressure at the downstream side of the valve element 5 is higher than fluid pressure at the upstream side of the valve element 5, a free end of the valve element 5 moves to the downstream side without abutting on the second side wall 3b. On the contrary, when the fluid pressure at the downstream side of the valve element is lower than the fluid pressure at the upstream side, the free end of the valve element 5 moves to the upstream side without abutting on the second side wall 3b. COPYRIGHT: (C)2011,JPO&INPIT
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