发明名称 METHOD OF FABRICATING ESD DEVICES USING MOSFET AND LDMOS ION IMPLANTATIONS
摘要 A method of forming complementary metal-oxide-silicon logic field effect transistors, high power transistors and electrostatic discharge protection diodes and/or electrostatic discharge protection shunt transistors on the same integrated circuit chip using ion implantations used to fabricate the field effect transistors and high-power transistor to simultaneously fabricate the electrostatic discharge protection diodes and/or electrostatic discharge protection shunt transistors.
申请公布号 US2011039378(A1) 申请公布日期 2011.02.17
申请号 US20090541484 申请日期 2009.08.14
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 VOLDMAN STEVEN HOWARD
分类号 H01L21/8238;H01L21/265 主分类号 H01L21/8238
代理机构 代理人
主权项
地址