| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light source device which stably maintains a high temperature plasma state, after the start of lighting, stably maintains light emission and suppresses drop of lighting lifetime due to heating of an arc tube. <P>SOLUTION: A pulsed laser beam is made incident on the arc tube 1, in which a light emission gas is enclosed from a pulsed laser oscillation part 21 and a laser beam of a continuous wave from a continuous wave laser oscillation part 25. Both beams are converged in the arc tube 1 so that they are overlapped. When lighting is started, the high temperature plasma state is formed by the pulsed beam and the beam of the continuous wave with intensity smaller than the pulsed beam is overlapped with a position where the high temperature plasma state is formed. Thus, the high-temperature plasma state can be maintained stably. Since the intensity of the beam of the continuous wave is small, the arc tube is prevented from being heated and service life can be prolonged. A diffraction optical element 31, a convex lens and a parabolic reflector, for example, can be used as an optical means for converging the beam in the arc tube 1. <P>COPYRIGHT: (C)2011,JPO&INPIT |
