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发明名称
Verfahren und Vorrichtung zum Steuern der Photolithographie-Überlagerungsjustierung mit vorwärtsgekoppelter Überlagerungsinformation
摘要
申请公布号
DE10297564(B4)
申请公布日期
2011.02.17
申请号
DE20021097564
申请日期
2002.06.27
申请人
ADVANCED MICRO DEVICES INC.
发明人
BODE, CHRISTOPHER A.;PASADYN, ALEXANDER J.
分类号
G03F9/00;G03F7/20;H01L21/027
主分类号
G03F9/00
代理机构
代理人
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