| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction table capable of reducing cost while maintaining a function of surely holding a suction object. SOLUTION: This suction table includes: a plate-like base body part 81 formed with intakes 81h on an upper surface 81a side; a sheet body 82 having ventilation and arranged on the upper surface 81a side of the base body part 81 to cover the intakes 81h; and a suction plate 83 formed with a plurality of vent holes 83c penetrating in the thickness direction and arranged on the upper surface 81a side by interposing the sheet body 82 so that one surface 83a faces the upper surface 81a of the base body part 81; wherein the intakes 81h communicate with the vent holes 83c through the sheet body 82 in the state where the suction plate 83 is arranged on the upper surface 81a side, and air is sucked from the intakes 81h to suck and hold a substrate 400 mounted on the other surface 83b of the suction plate 83. COPYRIGHT: (C)2011,JPO&INPIT
|
