PHOTOLUMINESCENCE IMAGING SYSTEMS FOR SILICON PHOTOVOLTAIC CELL MANUFACTURING
摘要
<p>A method of photoluminence (PL) imaging of a series of silicon wafers, the method including the step of: utilizing incident illumination of a wavelength greater than 808nm. The present invention further provides a method of analysing silicon semiconductor material utilising various illumination, camera and filter combinations. In some embodiments the PL response is captured by a MOSIR camera. In another embodiment a camera is used to capture the entire PL response and a long pass filter is applied to block a portion of the signal reaching the camera/detector.</p>
申请公布号
WO2011017775(A1)
申请公布日期
2011.02.17
申请号
WO2010AU01045
申请日期
2010.08.16
申请人
BT IMAGING PTY LTD;TRUPKE, THORSTEN;MAXWELL, IAN ANDREW;WEBER, JUERGEN;BARDOS, ROBERT ANDREW
发明人
TRUPKE, THORSTEN;MAXWELL, IAN ANDREW;WEBER, JUERGEN;BARDOS, ROBERT ANDREW