发明名称 |
DUAL PICKER CYLINDER, AND PICKING AND TRANSFERRING DEVICE FOR SEMICONDUCTOR PARTS HAVING THE SAME |
摘要 |
<p>PURPOSE: A dual picker cylinder and a semiconductor parts picking and transferring device having the same are provided to improve the process efficiency within a semiconductor apparatus by applying Y-axis variable motor and Y-axis variable assembly structure. CONSTITUTION: A picker cylinder guide part(320) supports a vacuum pad(310). A top body(330) supports the picker cylinder guide part. The top body forms the air pressure flowing way according to the air pressure. A guide projection is formed on the upper part of the top body. A guide linear rail(335) is configured in horizontal direction in order to enable the variable moving in Y direction of the vacuum pad.</p> |
申请公布号 |
KR20110016192(A) |
申请公布日期 |
2011.02.17 |
申请号 |
KR20090073781 |
申请日期 |
2009.08.11 |
申请人 |
AMT CO., LTD. |
发明人 |
KIM, DU CHUL;SONG, GI YOUNG |
分类号 |
H01L21/677;B25J15/06;B65G47/91;H05K13/02 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|