发明名称 |
Niederdrucksensor-Vorrichtung mit hoher Genauigkeit und hoher Empfindlichkeit |
摘要 |
<p>Pressure non-linearity in a low pressure sensor device formed from a silicon diaphragm with an embedded piezoresistive transducer is reduced by using a shallow boss or thin stiffener on an ultra-thin diaphragm while the pressure sensitivity of the device is increased with corner trenches.</p> |
申请公布号 |
DE102010031452(A1) |
申请公布日期 |
2011.02.17 |
申请号 |
DE20101031452 |
申请日期 |
2010.07.16 |
申请人 |
CONTINENTAL AUTOMOTIVE SYSTEMS INC. |
发明人 |
CHIOU, JEN-HUANG ALBERT;CHEN, SHIUH-HUI STEVEN |
分类号 |
G01L9/06 |
主分类号 |
G01L9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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