发明名称 Kontakteinheit
摘要 The present invention relates to a device for contacting a wafer during submersion in a liquid. The device comprises a main body fixed to a transportation device; an electrical contact for contacting the wafer and a pressure element for pressing the electrical contact towards the wafer.
申请公布号 DE112009000838(T5) 申请公布日期 2011.02.17
申请号 DE20091100838T 申请日期 2009.03.31
申请人 REC SOLAR AS 发明人 LUNDAHL, KARL IVAR;SJURSETH, BJOERN;AAMOLD, KETIL;RENSHUSLOEKKEN, RUNE;CABANAS-HOLMEN, KIRSTEN
分类号 H01L31/18 主分类号 H01L31/18
代理机构 代理人
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