The present invention relates to a device for contacting a wafer during submersion in a liquid. The device comprises a main body fixed to a transportation device; an electrical contact for contacting the wafer and a pressure element for pressing the electrical contact towards the wafer.
申请公布号
DE112009000838(T5)
申请公布日期
2011.02.17
申请号
DE20091100838T
申请日期
2009.03.31
申请人
REC SOLAR AS
发明人
LUNDAHL, KARL IVAR;SJURSETH, BJOERN;AAMOLD, KETIL;RENSHUSLOEKKEN, RUNE;CABANAS-HOLMEN, KIRSTEN