| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device with strong mounting strength. SOLUTION: The piezoelectric device is fixed to a mounting substrate by conductive adhesives, and is provided with: a substrate which consists of an insulating material; a through electrode which is formed in a desired area of the substrate so as to penetrate from a loading surface for loading a piezoelectric piece to a non-loading surface opposite to the loading surface of the substrate; the piezoelectric piece which is loaded on the loading surface of the substrate so as to be electrically connected to the through electrode; a cover which is joined to the substrate so as to form a storage portion which stores the piezoelectric piece; and an external terminal including an area in which the through electrode is exposed of the non-loading surface of the substrate, wherein the external terminal is provided with: a first metal film which consists of tungsten; a second metal film which is provided on the first metal film and consists of nickel with thickness of 8-20 μm; and a third metal film which is provided on the second metal film and consists of gold with thickness of 0.5-1 μm. COPYRIGHT: (C)2011,JPO&INPIT
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