CONNECTION DEVICE OF FLUID FLOW CHANNEL

摘要

PROBLEM TO BE SOLVED: To provide the connection device of a fluid flow channel capable of washing the mutual contact part of a female bonding member and a male bonding member without leaving coating residue. SOLUTION: The separation mechanism 100 of an insulating separation valve 32 is equipped with a main cylinder 111 for driving the female bonding member 32U by a predetermined thrust to allow first and second connection parts 54 and 64 to approach each other and a washing position cylinder 113 for driving the female bonding member 32U by the predetermined thrust to separate the first and second connection parts 54 and 64. A control unit controls the thrust produced in the main cylinder 111 so as to make the same larger than the force acting in the separation direction of the first and second connection parts 54 and 64 against the thrust produced in the main cylinder 111 at the time of supply of a washing fluid but less than the thrust produced in the washing position cylinder 113 when the first and second connection parts 54 and 64 are washed with the washing fluid to separate the first and second connection parts 54 and 64 within the close contact range of a seal member 66 and a recessed part 52. COPYRIGHT: (C)2011,JPO&INPIT