发明名称 APPARATUS AND METHOD FOR CONTROLLING A ACTUATOR OF EQUIPMENT
摘要 PURPOSE: A device and a method for controlling the actuator of equipment is provided to drive actuators in exact timings by directly applying driving power to each actuator according to inputted driving sequences. CONSTITUTION: An upper controlling part(100) outputs a performing signal(PS) to equipment(10) which performs a process based on the drive of an actuator(20). A lower controlling part(200) is connected between the upper controlling part and the equipment. The lower controlling part applies driving power to each actuator. In driving sequences, the driving order and the driving timing of actuators are set. A digital signal processor is embedded in the lower controlling part.
申请公布号 KR20110015965(A) 申请公布日期 2011.02.17
申请号 KR20090073436 申请日期 2009.08.10
申请人 SEMES CO., LTD. 发明人 KIM, EUN JUNG;KIM, TAE HOON
分类号 H01L21/68;H02P5/00 主分类号 H01L21/68
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