FIELD EMISSION ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To achieve long life of a field emission electron source through restraint of deterioration of electron emission part thereof.

SOLUTION: In the field emission electron source emitting electrons with application of an electric field, a conductive material 4 is arranged around an emitter 1 emitting an electron flow to a target 3 so that a distance between the target 3 and the emitter 1 is to be shorter than that between the target 3 and the conductive material 4, and a voltage approximately same to one applied between the target 3 and the emitter 1 is applied between the target 3 and the conductive material 4.

COPYRIGHT: (C)2011,JPO&INPIT