| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for electro-depositing nano patterns. SOLUTION: More specifically, systems and methods for fabricating periodic structures in complex nano-patterns are described. An electrical signal may be applied to one or more electrodes that are positioned about the surface of a substrate. The periodicity of the deposited pattern may be influenced by one or more parameters associated with an applied electrical signal, including one or more of frequency, amplitude, period, duty cycle, etc. The weight of each deposited line on the substrate may be influenced by the described parameters, and the shape of the pattern may be influenced by the number, shape, and position of electrodes. COPYRIGHT: (C)2011,JPO&INPIT
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