| 摘要 |
PROBLEM TO BE SOLVED: To provide a workpiece storage mechanism which safely stores a workpiece supported on an annular frame via an adhesive tape into a cassette by preventing breakage caused by collision of the annular frame against the cassette, and to provide a grinding device. SOLUTION: The workpiece storage mechanism includes: a workpiece unit support part 73 configured to support a workpiece unit 81 supporting a semiconductor wafer W at an opening part of the annular frame 82 via the adhesive tape; and moving mechanism 71, 72 that move the workpiece unit support part 73 to store the workpiece unit 81 into a conveying cassette 6, wherein the workpiece unit support part 73 is configured to support a lower surface of the workpiece unit 81 in a state in which the workpiece unit 81 is given horizontal backlash. COPYRIGHT: (C)2011,JPO&INPIT |
