| 摘要 |
The objective of the present invention is to realize a system in which a resist stripper liquid used in resist stripping is regulated so as to have a resist component concentration within a certain concentration range even when the resist stripper liquid is continuously used for a long time without replacing it. In stripping a positive resist with a stripper liquid, the resist components dissolving in the stripper liquid can be diminished by cross-flow filtration with a specific ceramic filter (5). In the resist stripping system, a resist-component-containing stripper liquid resulting from a stripping step is treated in a filtration step, and the resultant concentrated stripper liquid having a heightened resist-component concentration is suitably discharged from the system. A fresh stripper liquid is suitably added to the stripper liquid from which the resist components have been removed, and the resultant stripper liquid is reused in the stripping step.
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