Thermocompensated mechanical resonator

摘要

The resonator has a strip whose quadrilateral sectioned core is made of single-crystal silicon. The core is provided with a coating on one of its faces so as to enable the resonator to be sensitive to temperature variations, where the coating is made of silicon dioxide. Another face of the core is not coated. The strip forms two bars that are mounted symmetrically to form a tuning-fork, and forms a micro electro mechanical system. The strip is provided with a base (b) and a height (h) and coupled with a fly-wheel, and rolled on itself by forming a coil having length (l).