| 摘要 |
<p>PURPOSE:To prevent disconnection trouble in an upper electrode comprising thick film conductor layers regardless of repeated heating by arranging sensing materials in layers with the periphery in a tier-form to form a sensor section. CONSTITUTION:A sensor element is made up of an insulation substrate 1, a lower electrode 3 comprising a thick film layer and a multilayer sensing material provided on the top surface of the electrode 3. A sensor section 2 is formed with the periphery in a tier-form and a resistance heat generating body 5 is provided thereon to heat an upper electrode 4 and the sensor section 2. Thus, as sensing materials are laminated in layers with the periphery in a stair case, the sensor section 2 of the upper electrode 4 can be formed without reducing the film thickness in the edge section thereof 2 thereby improving the mechanical strength of the electrode 4 with a sufficient thickness in the edge section thereof 2.</p> |
