发明名称 Method of making an integrated circuit including structuring a material
摘要 A method of making an integrated circuit including structuring a material. The method includes providing an arrangement of three-dimensional bodies. The material is arranged between the bodies and structured directed radiation. The projection pattern of the three-dimensional bodies is transferred into the material. The structured material connects at least two of the three-dimensional bodies.
申请公布号 US7888230(B2) 申请公布日期 2011.02.15
申请号 US20080121331 申请日期 2008.05.15
申请人 QIMONDA AG 发明人 VON KLUGE JOHANNES
分类号 H01L21/20 主分类号 H01L21/20
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