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发明名称
摘要
申请公布号	JPS59502164(A)	申请公布日期	1984.12.27
申请号	JP19840500115	申请日期	1983.12.01
申请人		发明人
分类号	H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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