| 摘要 |
An amorphous carbon (DLC) film having excellent adhesion at high temperature is provided. An amorphous-carbon-based hard multilayer film, which is formed on a surface of a substrate, includes a base layer formed at a substrate side, a surface layer formed at a surface side, and a compositional gradient layer formed between the base layer and the surface layer, wherein the base layer includes a nitride or a carbo-nitride of an element M expressed by the following formula (1), the surface layer includes an amorphous carbon film containing C of 50 atomic percent or more, and the compositional gradient layer is a layer in which the element M and nitrogen are decreased, and carbon is increased from the base layer to the amorphous carbon film: M1-x-yCxNy  (1), (wherein M is at least one selected from a group 4A element in the periodic table, a group 5A element, a group 6A element, Al, and Si, and x and y denote atomic ratios in the formula, and x is 0.5 or less, y is 0.03 or more, and 1-x-y is more then 0).
|
