MICROMECHANICAL COMPONENT, LIGHT DEFLECTION DEVICE AND METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT AND A LIGHT DEFLECTION DEVICE

摘要

PURPOSE: A micromechanical component, a light deflection device and a method for producing a micromechanical component and a light deflection device are provided to form phase difference which is time variable between spherical waves which is generated through the surface of a mirror while preventing the coherence of deflected light. CONSTITUTION: The second outer side surface(14) of a mirror member(10) which is opposite to the first outer side surface(12) thereof. The mirror member has a reflecting surface(12a) on the first outer side surface in order to apply a first electric potential to the first electrode side(14a) on the second outer side surface. An opposite electrode(20) is arranged to be contiguous to the second outer side surface of the mirror member. The opposite electrode applies a second electric potential to the second electrode side of the opposite electrode. A voltage control device(24) applies a voltage signal which is time variable between the first electrode side and the second electrode side.