| 摘要 |
<p>PURPOSE:To make it possible to identify the forming process or the inspection details, etc. of a pellet by a method wherein a data concentrated identification part is independently formed in an arbitrary position on the periphery of a circuit forming part of pellet. CONSTITUTION:A wiring forming part 2 with large size is formed in almost central position of a silicon substrate 1 while a data concentrated identification part 3 is formed at a corner on the periphery of the wiring forming part 2. Through these procedures, the identification part 3 provided with data of high density may be formed by means of concentrating numerous data in one position to read any recorded data accurately and easily as well as recording any data by letters, figures or codes or arbitrary combination thereof. Besides, the identification part 3 may be preliminarily formed or any data may be additionally written in every circuit forming process of a pellet.</p> |
