METHOD AND APPARATUS FOR FABRICATING PATTERN

摘要

PURPOSE: A method and an apparatus for forming a pattern are provided to simplify a pattern manufacturing process of a complex mold by using a fiber laser of an infrared band. CONSTITUTION: A self-assembled monolayer is formed on the surface of a substrate(S100). The self-assembled monolayer is arranged to face a metal substrate(S200). Plasma is generated on a preset region by radiating laser from the substrate to the metal substrate. The self-assembled monolayer formed on the preset region is removed with the plasma(S300).