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发明名称
APPEARANCE INSPECTING METHOD OF SEMICONDUCTOR CHIP AND ITS DEVICE
摘要
申请公布号
KR101013573(B1)
申请公布日期
2011.02.14
申请号
KR20080130404
申请日期
2008.12.19
申请人
发明人
分类号
H01L21/66;H01L21/68
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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