| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the detection accuracy of angular velocity in an angular velocity sensor unit used for various electronic apparatuses. <P>SOLUTION: The angular velocity sensor unit includes a package 1, an angular velocity sensor element 2 arranged inside the package 1; a pedestal 9 that supports the angular velocity sensor element 2 and secures vibration space of the angular velocity sensor element 2; and a vibration-proof member 8, that suspends the pedestal 9 in an internal space of the package 1 and suppresses the vibration applied to the angular velocity sensor element 2 from the package 1. The center-of-gravity position of a composite of the angular velocity sensor element 2 and the pedestal 9 is made to substantially coincide with the member plane of the vibration-proof member 8. <P>COPYRIGHT: (C)2011,JPO&INPIT |
