| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin-film characteristic measuring method capable of measuring properties of a conductive thin film, formed on an insulating substrate sectioned into a plurality of electrodes with a plurality of grooves, more in detail. <P>SOLUTION: This invention relates to a method of measuring electric properties between two electrodes having a groove interposed therebetween. A part formed of a creep-side part of one of the electrodes, having the groove interposed therebetween, which faces the groove, the groove, and a creep-side part of the other one of the electrodes, having the groove interposed therebetween, which faces the groove is regarded as a capacitor, and a method of measuring properties is applied to the capacitor to measure the electric properties between the two electrodes having the groove interposed therebetween. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
