POSITION-DEVIATION PREVENTION DEVICE, SUBSTRATE HOLDER INCLUDING THIS, SUBSTRATE CONVEYING DEVICE, AND SUBSTRATE CONVEYING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a position-deviation prevention device capable of suppressing position-deviation of a substrate retained to a substrate holder even in the vacuum state. SOLUTION: The position-deviation prevention device 201 detachably attachable to a fork 101 includes a body 203; a plurality of movable pins 205 projectedly provided on an upper surface 203a of the body 203; and coil springs 207 for each independently urging the movable pins 205 in an upper direction (projecting direction). COPYRIGHT: (C)2011,JPO&INPIT