| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma treatment apparatus and a method for producing an optical element forming die, with which while equalizing the releasing directions of plasma, droplets and scattered particles can be easily removed, and the quality of surface treatment can be improved. SOLUTION: The plasma treatment apparatus 1 is provided with: a plasma release part 10 having a target 6 and an anode electrode, and releasing plasma 8 by arc discharge; a deflection part 13 deflecting the plasma 8 and transporting the same to the surface of a die base material 11 for forming an optical element; and a shielding board 20 shielding a passage going straight from the surface of the target 6 to the die base material 11 for forming an optical element. The anode electrode is provided with: a circumferential electrode part where a plurality of arcuate conductors are arranged so as to circulate around the axial direction of the target 6, and the respective openings of the arcuate conductors are arranged at the side opposite to the die base material 11 for forming an optical element with the target 6 interposed; and a wiring part feeding electric current to the circulation electrode part. COPYRIGHT: (C)2011,JPO&INPIT |
