| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical system for laser machining capable of efficiently carrying out uniform machining along each machining line and of improving machining quality, and also to provide a laser machining device having the same. <P>SOLUTION: The optical system includes: a pair of prisms 132 for converting laser beam irradiated from a laser light source 11 into elliptic laser beam having an elliptic cross section; prism rotating mechanisms 133a, 133b for changing length in a long axis direction in the elliptic cross section of the elliptic laser beam converted by the pair of the prisms 132; a prism moving mechanism 14 for moving the pair of the prisms 132 in parallel along the long axis direction in the elliptic cross section of the elliptic laser beam converted by the pair of the prisms 132; and a condenser lens 16 for condensing the elliptic laser beam toward a workpiece. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
